Nanopositioning Stages Grow Smaller

Nanopositioning specialist PI (Physik Instrumente) offers a number of nanopositioning stages for demanding applications where space is at a premium. These monolithic, high-speed positioning systems provide resolutions to better than 1/10 of a nanometer (diameter of an atom) in a package smaller than a matchbox. Despite the diminutive dimensions, high-precision direct metrology capacitive sensors are integrated.

Nanopositioning Stages Grow Smaller

Careful attention to mass minimization results in high resonant frequencies up to 3 kHz and a significant reduction in inertial recoil forces. These design features enhance overall system response and stability and allow step and settling times in the millisecond range and below.

For optimized operation and interchangeability of the nanomechanisms and controller, the stages are equipped with an ID chip that holds all calibration data and sends it to the digital controller when powered up. Additionally, the nanopositioning stages integrate a sophisticated zero-friction flexure guiding system providing nanometer level straightness. They are driven by ceramic-encapsulated piezo drives for higher reliability and increased life time.

A variety of ultra-low-noise 32-bit digital controllers provide fast communications and come with a wide selection of software tools. Applications include nanometrology, interferometry, data storage, and semiconductor test systems.

Visit www.pi.ws.

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