Digital MEMS-Based Vacuum Transducers

MKS has expanded its technology-proven HPS® vacuum gauge line with a new offering of digital MEMS-based vacuum transducers. The new technology allows for very compact units, with faster response times and higher accuracies. The new transducers expand MKS’ portfolio of products that help optimize manufacturing processes for a range of industries, including semiconductors, biotechnology, pharmaceutical and thin film deposition for a variety of applications like roughing, loadlock control and base pressure measurement.

These MEMS-based transducers are innovative in that they use new solid state designs and provide real-time access to process data. They replace sensors with older output technologies that must first be converted before they can be analyzed. The compact size reduces system footprint requirements, as well as expense to the overall system, often replacing up to three gauges on a system. The new MKS-HPS transducer line brings higher levels of vacuum gauge integration to the end-user.

Included in this new product offering are Piezo sensors for atmosphere sensing, an ultracompact MicroPirani for rough to medium vacuum measurement and an innovative ionization transducer for medium to ultrahigh vacuum measurement.

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