EBARA, UAlbany Nanocollege Launch $5M Nanoelectronics R&D Partnership

EBARA Corporation (“EBARA”), a Japanese-based equipment and component supplier for semiconductor manufacturing, will conduct next-generation nanoelectronics research and development at the Albany NanoTech complex as part of a $5 million program being launched in partnership with the College of Nanoscale Science and Engineering (“CNSE”) of the University at Albany.

Located at CNSE’s Center for Semiconductor Research, the three-year program is designed to develop advanced chemical mechanical planarization (“CMP”) processes and electrolytic plating methodologies for 300mm copper wiring applications. The goal of the joint initiative is to support process and hardware advances that will enhance reliability in leading-edge nanoelectronics device manufacturing at the 32nm node and beyond.
As part of the agreement, EBARA will initially locate five employees at CNSE’s Albany NanoTech complex. In addition to utilizing the world-class facilities of the UAlbany NanoCollege, EBARA has installed two new tools, one designed for CMP and the other for electrochemical deposition.
“We are very excited to have this international alliance with the College of Nanoscale Science and Engineering and Albany NanoTech in the state of New York,” said Dr. Manabu Tsujimura, Senior Executive Officer of EBARA. “The potential outcomes from this program, with the leading-edge capabilities of metrology and wafer processing, will be a key for our development for the 32nm technology node and beyond.”
“It is a pleasure to welcome still another global partner to CNSE’s Albany NanoTech complex. This new collaboration with EBARA Corporation is further evidence that New York State is a desired location for the world’s leading nanoelectronics companies, as a direct result of the vision and strategy of Governor Pataki, Speaker Silver and Majority Leader Bruno,” said Dr. Alain E. Kaloyeros, vice president and chief administrative officer of CNSE. “It also demonstrates the first-rate nature of the people, tools and resources at the UAlbany NanoCollege, which are providing a strong and consistent lure for companies seeking to conduct cutting-edge research and development using innovative nanoscale science and engineering.”
The agreement between EBARA and CNSE also includes the potential for further research and development initiatives in the future, which may include the location of additional EBARA employees and tools at Albany NanoTech.
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