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Compact Piezo XY-Tables for Nanopositioning
Applications
PI (Physik Instrumente) L.P., a leading
manufacturer of nanopositioning and precision motion-control
equipment for  biotechnology,
nanotechnology, photonics, semiconductor and life science
applications, offers the P-621.2CD through P-628.2CD
series of compact XY piezo-driven nanopositioning tables.
These flexure-guided precision tables are ideal for
high accuracy positioning / scanning and provide travel
ranges of 50x50 microns to 1x1 millimeter.
The compact size is achieved with a new, friction-free
and extremely stiff flexure system, which also provides
fast response and excellent guiding accuracy. Trajectory
precision is in the low-nanometer range. Multiple high-force
multilayer piezoelectric linear actuators provide high
acceleration forces.
Typical Applications: Nano-Metrology, Scanning Probe
Microscopy, Nanometrology, Biotechnology, Interferometry,
Nanopositioning, Quality Assurance, and Semiconductor
Technology
Features & Advantages:
* Closed-Loop Digital Control for Up to 99.98 % Position
Accuracy
* Resolution <1 nm
* 50x50 to 1000 x 1000 µm XY-Travel
* Vacuum-Compatible
* Stiff and Compact Design for High Resonant Frequencies
and Easy Integration
* Frictionless, Maintenance-Free Precision Flexure Guiding
System
* Ceramic-Encapsulated Piezo Drives for Humidity Protection
* Capacitive Direct-Metrology Sensors for Faster Servo
Response
Because piezoelectric actuators, flexure-guides and
feedback-sensors are all frictionless and maintenance-free,
these XY-tables achieve outstanding levels of reliability.
The integrated multilayer piezo drives are protected
against humidity by a patented ceramic-encapsulation.
The stages are equipped with non-contact capacitive-sensors
for excellent motion linearity to 99.98% and positional
resolution in the sub-nanometre range.
A variety of 32-bit, ultra-low noise digital-controllers
provide fast communications and come with a wide selection
of software tools. Low-Cost analogue contrtollers are
also available.
Visit www.pi.ws
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