Heidelberg Instruments Installs a Laser Lithography System

Heidelberg Instruments, a leader in design, development and production of laser lithography systems, announced the installation of a MW800 system with grey scale exposure capability at a major Japanese based customer.

This system will be used for production of advanced display and micro optic devices.\
The MW800 laser lithography system, with the grey scale exposure capability, will be able to expose patterns up to 800 mm by 700 mm with 128 grey levels. One of the major applications of the grey scale exposure feature is to form Micro Lens Array structures directly on the photoresist for advanced display industries.
“We started working on the grey scale exposure technology over 6 years ago when it was incorporated on our smaller DWL66 based systems, mainly for various projects in the research and development environments. In recent years we have worked extensively to implement this technology for commercial based applications and have successfully integrated it in our large area exposure systems.” states Alexander Forozan, Vice President of Sales and Marketing, Heidelberg Instruments
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