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Chemical Vapor Deposition Tool
Structured Materials Industries, Inc. has released
its new induction-heated Chemical Vapor Deposition tool
for high-temperature and low-pressure operation –
the Dragon CVDTM tool. Designed to operate at deposition
process temperatures through 2000 degrees Centigrade
at low pressures, the Dragon CVD tool presents researchers
with a significant new tool to research high temperature
deposition processes. This tool was designed and built
in collaboration with Penn State University Electro-Optics
and addresses both high temperature CVD and PVD. The
system features:
· 50 KWatt induction heater system with tuned
capacitor
· Fully automated Process Control
· Safety features
· Sheet programming, real time monitoring and
trend analysis among other features
· Gas and metal organic source capabilities
· Compact footprint – Economical price
· CVD or PVD operation
This system complements the growing product line of
oxide, nitride and carbide tools offered by Structured
Materials Industries, Inc. SMI also specializes in custom
systems, reactors and other components for CVD and related
technologies.
Visit www.structuredmaterials.com
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