NanoGetters® expands its manufacturing infrastructure for high-volume production

Ypsilanti, Michigan, September 19th 2006 –Integrated Sensing Systems, Inc. (ISSYS) and its subsidiary NanoGetters® announced that it has successfully expanded its manufacturing infrastructure for high-volume production. This expansion supplements the other wafer fabrication and deposition equipment already in use by the company in its class 100 cleanroom. This high-volume infrastructure can handle up to 100,000 wafers (4, 6 and 8 inches in diameter) per year. The NanoGetter® technology offers wafer-level, high-vacuum, packaging for a variety of MEMS products. Getters are reactive materials used to improve vacuum quality by reducing residual gas molecules in devices such as displays, gyroscopes, infrared sensors, accelerometers, RF-MEMS used in cell phones and pressure sensors. Long-term and stable vacuum levels less than 1 milli-Torr have been produced by NanoGetter® products. This patent-protected technology can also be used in gas purification and for improving inert gas packaging. Dr. Douglas R. Sparks, President of NanoGetters® and ISSYS Executive Vice President stated “it has been exciting to see NanoGetters® and ISSYS grow in the past few years. The need for expansion was two folded, first many of our customers are getting ready for high-volume production and secondly, ISSYS is preparing for high-volume production (2007) of sensors for Direct Methanol Fuel Cell (DMFC) products, as well as disposable medical products for drug delivery and detection of drug delivery errors.”
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