MEMS Software

SoftMEMS (Los Gatos, CA) has released a new version of its flagship product, MEMS Pro, a CAD tool suite for the design and analysis of MEMS including the associated electronics and packaging. It offers an integrated solution for the design process that shortens development time while providing designers with reliable analysis before manufacture. SoftMEMS tools are integrated within state of the art IC and CAM design environments.

Functionalities include mixed MEMS/IC schematic capture and simulation, full custom mask layout capabilities, MEMS-specific layout productivity tools and design verification, 3D model generation and visualization, behavioral model creation, and links to 3D analysis packages.

“Since MEMS-based products usually include a combination of MEMS and interface circuits, we have from the very beginning created tools enabling MEMS, packaging, and electronics co-design,” said Dr. Mary Ann Maher, SoftMEMS CEO. “Our early positioning of combining MEMS and IC design tools allowed us to benefit from the work invested into an efficient design for manufacturing approach by the IC industry and to concentrate on adding MEMS design-specific features. Our tools have always been about improving MEMS designers’ productivity in creating manufacturable MEMS products.”

MEMS Pro 5.1 features better interoperability with finite element solvers, offering more output formats for 3D geometries, better material properties handling, and improved automatic meshing capabilities. The link between 2D layout and 3D modeling has also been improved by automatic translation of curvilinear shapes used in MEMS from polygonized GDSII masks.

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MEMSPro’s physical design environment includes a fully hierarchical and full custom editor engineered for MEMS and IC design.