6-D Nanopositioning System

Physik Instrumente (PI, Auburn, MA) offers a 6-axis piezo nanopositioning and scanning system, the P-587.6CD. It was designed for high-end applications such as nanomanufacturing, nanometrology, scanning microscopy, optics, and mask alignment. The system features 6 degrees of freedom, 6-axis digital control, active trajectory error compensation, millisecond responsiveness, nanometer resolution, and long travel ranges to 800 µm. Developed for industrial OEM applications, the system also features an integrated AutoCalibration function for fast setup, and interchangeability of controllers and nanomechanisms.

A parallel-metrology design was chosen for improved multi-axis precision. With parallel metrology, all sensors measure the position of the same moving platform against the same stationary reference (the fixed frame). This means that all motion is inside the servo-loop, no matter which actuator may have caused it.

Typical applications include nanolithography, nanometrology, semiconductor inspection systems, CD measurement, mask alignment, high-resolution microscopy, and head/media test systems.

The P-587.6CD is designed for high-end applications such as nanomanufacturing, nanometrology, scanning microscopy, optics, and mask alignment.

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