Induction-Heated Chemical Vapor Deposition Tool

Structured Materials Industries, Inc. has released its new Induction heated Chemical Vapor Deposition tool for Very High Temperature and Low Pressure Operation – the Dragon CVDTM tool. Designed to operate at deposition process temperatures through 2000 degrees Centigrade at low pressures, the Dragon CVD tool presents researchers with a significant new tool to research high temperature deposition processes. This tool was designed and built in collaboration with Penn State University Electro-Optics and addresses both high temperature CVD and PVD. The system features:
· 50 KWatt induction heater system with tuned capacitor
· Fully automated Process Control
· Safety features
· Sheet programming, real time monitoring and trend analysis among other features
· Gas and metal organic source capabilities
· Compact footprint – Economical price
· CVD or PVD operation
This system complements the growing product line of oxide, nitride and carbide tools offered by Structured Materials Industries, Inc. SMI also specializes in custom systems, reactors and other components for CVD and related technologies.
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