A Totally Integrated MEMS Driver Solution

TEGAM, Inc. (Geneva, OH) has released the Model 9070 high-voltage, multi-channel, totally integrated system for driving rotating MEMS microengines.

Model 9070 provides the necessary waveforms and instrument controls to drive MEMS devices with maximum reliability. A typical system consists of Super µDriver™ Software (distributed by TEGAM under license from Sandia National Laboratories), one 2375 MEMS Driver Amplifier providing four flexible output channels, and two 2414A-GS waveform generators. These true arbitrary waveform generators include built-in sequencers and programmable synchronous outputs for driving mechanisms that require complex drive signals or for use in instances where external hardware must be triggered for collection of characterization data. Variations on the basic 9070 system can be attained by upgrading or changing its modular components.

The system fulfills the need for characterization, dynamic performance evaluation, and all phases of reliability assessment for orthogonal comb drives, cantilevered beams, and other electrostatically controlled MEMS devices and actuators.

Find out more at: www.tegam.com