Heidelberg Instruments Introduces a Table-Top Maskless Lithography System

Heidelberg Instruments (Heidelberg, Germany) announced the development of a tabletop maskless lithography system, the µPG101.

The µPG101 is an extremely economical and easy to use Micro Pattern Generator for direct write applications as well as low volume mask making. It is also perfectly suitable for rapid prototyping of 2D and 3D microstructures on substrates up to 4 inches by 4 inches, and is capable of exposing features down to 5 microns, with an address grid of 100nm.

The µPG101 maskless lithography system offers a very small footprint of 60cm by 60cm. It presents a highly flexible, out of the box tool which is capable of layer to layer alignment through its integrated camera system. Applications include MEMS, BioMEMS, Integrated Optics, Micro Fluidics, µTAS, or similar areas requiring microstructures

With an installation base of more than 250 systems in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

Visit www.himt.de